计量学报2009，Vol.30Issue(z1)：42-46,5.DOI:10.3969/j.issn.1000-1158.2009.z1.010
激光二坐标测量装置显微视觉关键技术的研究
Study on the Key Technology of Micro Vision in Laser Two-coordinate Measurement Device
摘要
Abstract
The key technology of Micro-vision system in laser two-coordinate measurement device is studied to meet the needs of the high precision measurement of two-dimensional (2-D) line scale standard. The operation principle of laser two-coordinate measurement device and the hardware structure of micro-vision system are analyzed. A feature point tracking and detecting algorithm based on directional chain code is put forward to detecting image edges quickly and accurately. A rectification model of two coordinates is made to improve the accuracy of measurement. Experimental results reveal that the twice standard deviation of measurement repeatability of the line distance and line width 2-D line scale standard is less than 10nm.关键词
计量学/激光二坐标测量装置/显微视觉/二维线纹标准器/方向链码/线间距Key words
Metrology/Laser two-coordinate measurement device/Micro vision/2-D line scale standard/Directional chain code/Line distance分类
通用工业技术引用本文复制引用
孙双花,薛梓,叶孝佑,高宏堂..激光二坐标测量装置显微视觉关键技术的研究[J].计量学报,2009,30(z1):42-46,5.基金项目
中国计量科学研究院博士科研专项启动基金(AKYB0704) （AKYB0704）
