强激光与粒子束2009，Vol.21Issue(11)：1677-1680,4.
基于高分辨力CCD的大口径光学元件疵病检测
Defect testing of large aperture optics based on high resolution CCD camera
摘要
Abstract
A fast testing method on inspecting defects of large aperture optics was introduced. With uniform illumination by LED source at grazing incidence, the image of defects on the surface of and inside the large aperture optics could be enlarged due to scattering. The images of defects were got by high resolution CCD camera and microscope, and the approximate mathematical relation between viewing dimension and real dimension of defects was simulated. Thus the approximate real dimension and location of all defects could be calculated through the high resolution pictures.关键词
ICF/大口径光学元件/疵病/快速检测Key words
ICF/ large aperture optics/ defects/ fast testing分类
信息技术与安全科学引用本文复制引用
程晓锋,徐旭,张林,贺群,袁晓东,蒋晓东,郑万国..基于高分辨力CCD的大口径光学元件疵病检测[J].强激光与粒子束,2009,21(11):1677-1680,4.基金项目
国家高技术发展计划项目 （）
