人工晶体学报2009，Vol.38Issue(5)：1083-1087,5.
室温下金刚石薄膜上沉积立方氮化硼薄膜的研究
Study on the c-BN Films Deposited on Diamond Films at Room Temperature
摘要
Abstract
The c-BN films were prepared by radio frequency magnetron sputtering on the nanocrystalline and microcrystalline diamond films.Diamond films were characterized by Raman spectroscopy and atomic force microscopy.Fourier transform infrared spectroscopy (FTIR) was adopted to characterize the effect of different deposition temperatures on the growth of BN films. Experimental results show that there isn't threshold temperature occurs on the deposition of c-BN, and the content of cubic phase in the BN films prepared at room temperature could be more than 70%. When the nanocrystalline diamond films are used as substrates, the content of cubic phase in the BN films will decrease as the temperature increasing. Furthermore, the FTIR peak corresponding to c-BN shifts to a lower wavenumber with decreasing the growth temperature, indicating that less stress appears in the c-BN films at a lower growth temperature.The reason caused this phenomenon was dissused in this paper.关键词
BN薄膜/金刚石薄膜/射频磁控溅射Key words
BN thin film/ diamond film/ radio frequency magnetron sputtering分类
数理科学引用本文复制引用
冯健,徐闰,汤敏燕,张旭,乐永康,王林军..室温下金刚石薄膜上沉积立方氮化硼薄膜的研究[J].人工晶体学报,2009,38(5):1083-1087,5.基金项目
上海市教育委员会优秀青年基金(No.006AZ008) （No.006AZ008）
国家自然科学基金(No.60577040 （）
60877017) （）
