物理化学学报2009，Vol.25Issue(11)：2391-2394,4.
以Au和Au-Cu为衬底的Si/DLC薄膜的机械性能
Mechanical Properties of Si/DLC Films on Au and Au-Cu Substrates
摘要
Abstract
The mechanical properties of Si/DLC (diamond-like carbon, around 10 nm) films on Au and Au-Cu (x_(Au)= 93％, x_(Cu)=7％) substrates were studied by nanoscratch tests. Results show that Au-Cu exhibits better adhesion to Si/ DLC than Au does to Si/DLC. Ultraviolet (244 nm) Raman spectra show that DLC films on Au-Cu contain more sp~3 character than those on Au using the same batch coating process. This indicates greater hardness and higher density of the films on Au-Cu. The implications of these results on the mechanisms proposed for film formation are discussed. Au-Cu is thus a better candidate for use as a lead material in Si/DLC coatings because of its better adhesion and greater hardness for magnetic recording sliders.关键词
拉曼光谱/类金刚石薄膜/结合力/硬度Key words
Raman spectroscopy/Diamond-like carbon film/Adhesion/Hardness分类
化学化工引用本文复制引用
屈少华,贾丽慧..以Au和Au-Cu为衬底的Si/DLC薄膜的机械性能[J].物理化学学报,2009,25(11):2391-2394,4.基金项目
The project was supported by the Science and Technology Research Project Foundation of the Educational Department of Hubei Province, China (Z200525001).湖北省教育厅重大科研项(Z200525001)资助 （Z200525001）
