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硬X射线光子筛波导效应研究

谢常青 朱效立 贾佳

物理学报2009,Vol.58Issue(11):8062-8066,5.
物理学报2009,Vol.58Issue(11):8062-8066,5.

硬X射线光子筛波导效应研究

The waveguide effect of hard X-ray photon sieves

谢常青 1朱效立 1贾佳1

作者信息

  • 1. 中国科学院微电子研究所,北京,100029
  • 折叠

摘要

Abstract

In this work,the waveguide effect inside the high high-aspect-ratio metal structure of hard X-ray photon sieves is studied based on fast fourier transform beam propagation method (FFT-BPM). After the physical boundary condition immediately downstream of hard X-ray photon sieves is determined by FFT-BPM, the angular spectrum method is used to calculate the point spread function, and the absorber thickness impact on the focusing performance is analyzed. The results show that the waveguide effect can suppress the emergence of the high order diffraction of hard X-ray photon sieves to some extent, thus improve its focusing performance. Under the same feature size conditions, the spatial resolution of hard X-ray photon sieves is better than that of Fresnel zone plates, with the drawback of lower diffraction efficiency. With the absorber thickness increasing, both the focusing performance and diffraction efficiency of photon sieves will improve, but the difficulty of the corresponding nanofabrication process will also increase.

关键词

菲涅尔波带片/硬X射线光子筛/光束传播法/角谱法

Key words

Fresnel zone plates/hard X-ray photon sieve/beam propagation method/angular spectrum method

分类

数理科学

引用本文复制引用

谢常青,朱效立,贾佳..硬X射线光子筛波导效应研究[J].物理学报,2009,58(11):8062-8066,5.

基金项目

国家重点基础研究发展计划(批准号:2007CB935302)和国家自然科学基金(批准号:60676008)资助的课题.Project supported by National Basic Research Program of China (Grant No. 2007CB935302) and the National Nature Science Foundation of China (Grant No. 60676008). (批准号:2007CB935302)

物理学报

OA北大核心CSCDCSTPCDSCI

1000-3290

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