应用化学2009，Vol.26Issue(10)：1194-1199,6.
硫鎓盐产酸剂的合成及其产酸效率
Synthesis and Acid-generation Efficiency of Sulfonium Photoacid Generators
杨幸幸 1邹应全1
作者信息
- 1. 北京师范大学化学学院,北京,100875
- 折叠
摘要
Abstract
Six sulfonium photoacid generators(PAGs) which were used in 248 nm photoresists were synthesized, some of which were innovated by our lab for the first time. The synthesis method is very simple and environment-friendly, with high yields at the same time. All the PAGs were identified by IR, HNMR and UV. The max wavelengths of ultraviolet absorption are between 250 nm and 285 nm, and the absorption region are so wide that these PAGs can be used extensively. We used rhodamine B and ultraviolet spectrophotometer to evaluate the acid-generation efficiency of the PAGs in acetonitrile because rhodamine B will change colour by the change of acid concentration. The PAGs synthesized by thioxanthen-9-one and isopropylthioxanthen-9-one were choosed as the best ones. We also studied how the solvent affect the acid-generation by fluorescence, and found that the acid-generation efficiency would be depressed by the decrease of the solvent′s polarity. All the work about the PAGs can provide an important reference to 248 nm photoresists.关键词
硫鎓盐/产酸剂/产酸效率Key words
sulfonium salt/photoacid generator/acid-generation efficiency分类
化学化工引用本文复制引用
杨幸幸,邹应全..硫鎓盐产酸剂的合成及其产酸效率[J].应用化学,2009,26(10):1194-1199,6.
