中国机械工程2009，Vol.20Issue(22)：2717-2721,5.
压电陶瓷驱动的超精密快刀伺服系统的设计与研制
Design and Development of an Ultra-precision Fast Tool Servo System Driven by Piezoelectric Ceramic
摘要
Abstract
Based on piezoelectric actuator and flexure hinge platform, the design, motion modeling and development of FTS device were studied systematically herein. The testing results indicate that the positioning errors are less than 7.7nm, the repetitive positioning error is less than 4.4nm,the linearity precedes 0. 145% and the frequency response precedes 218Hz at 39.0μm travel range for self-developed FTS system, and these performances can completely satisfy the machining requirements for the elements or structures with complex form. A good foundation for future use was built in real manufacture.关键词
快刀伺服/复杂面形/压电陶瓷/柔性铰链Key words
fast tool servo (FTS) /complex form/ piezoelectric ceramic (PZT)/ flexure hinge分类
矿业与冶金引用本文复制引用
戴一帆,杨海宽,王贵林,杨帆,吴宇列..压电陶瓷驱动的超精密快刀伺服系统的设计与研制[J].中国机械工程,2009,20(22):2717-2721,5.基金项目
国家自然科学基金资助重点项目(50735007) （50735007）
