物理学报2011，Vol.60Issue(8)：456-461,6.
有限尺寸方靶等离子体离子注入动力学的三维粒子模拟研究
Numerical simulation of plasma immersion ion implantation for cubic target with finite length using three-dimensional particle-in-cell model
摘要
Abstract
Plasma immersion ion implantation （PIII） of the square target with finite length is simulated using a three-dimensional particle-in-cell （PIC） plasma simulation in this paper.The incident dose,the impact angle and the implanted energy on the target surface are investigated.The results show that the sheath around the square target with finite length becomes spherical rapidly during PIII.And the three-dimensional sheath width is small apparently compared with the one simulated by two-dimensional PIC.And it is found that the three-dimensional ion dose is not evenly distributed on the target surface during simulation time （50ω-1pi） in this work.The dose is smallest in the center of the target,and it is largest near the corner.This is due to spherical sheath where ions are focused and accelerated into near the corner.In the central zone,the ion incidence is nearly normal to the surface,and the impact average energy exceeds 90% of the maximum.But the impact angle near the corner is always nearly 45°,and the implanted energy is only about 50% of the maximum.关键词
等离子体浸没离子注入/数值模拟/三维粒子模拟/有限尺寸方靶Key words
plasma immersion ion implantation/numerical simulation/three-dimensional particle-in-cell/cubic target with finite length分类
数理科学引用本文复制引用
王蓬,田修波,汪志健,巩春志,杨士勤..有限尺寸方靶等离子体离子注入动力学的三维粒子模拟研究[J].物理学报,2011,60(8):456-461,6.基金项目
国家自然科学基金（批准号：50773015 10775036）资助的课题 （）
