物理学报2011，Vol.60Issue(8)：485-490,6.
电阻热蒸发镀膜与电子束蒸发镀膜对纳米球刻蚀方法制备二维银纳米阵列结构的影响
Effects of thermal evaporation and electron beam evaporation on two-dimensional patterned Ag nanostructure during nanosphere lithography
摘要
Abstract
In the process of fabricating two-dimensional Ag nano-arrays via nanosphere lithography,different deposition methods present different lattice point shapes of Ag nanostructure.Nano-triangles are produced by thermal evaporation whereas nano-rings are obtained by electron beam evaporation although they are both of hexagonal lattice.It is indicated that the sizes,the surface nanocurvature,the thermal and the kinetic energies of the particles deposited are key factors controlling the formation of the shape of Ag lattice point.关键词
银纳米阵列/电阻热蒸发/电子束蒸发/纳米球刻蚀Key words
Ag nano-arrays/thermal evaporation/electron beam evaporation/nanosphere lithography分类
信息技术与安全科学引用本文复制引用
罗银燕,朱贤方..电阻热蒸发镀膜与电子束蒸发镀膜对纳米球刻蚀方法制备二维银纳米阵列结构的影响[J].物理学报,2011,60(8):485-490,6.基金项目
科学技术部国际科技合作计划 （）
国家重点基础研究发展计划 （）
国家自然科学基金（批准号：60776007 11074207）资助的课题 （）
