真空电子技术Issue(3)：59-61,3.
输出窗的二次电子的作用及其抑制措施
The Secondary Electron Emission of the Klystron's Output Window and Its Restraining Method
郑晓阳 1张永清1
作者信息
- 1. 中国科学院电子学研究所,中国科学院高功率微波源与技术重点实验室,北京,100190
- 折叠
摘要
Abstract
This paper discuss various factors which cause the damage of microwave output window and indicate that secondary electron's multiplication is the main reason. In the technical measures which suppress the emission of the secondary electron, the performance of titanium nitride films and the process characteristics of magnetron sputtering are described in detail.关键词
次级电子/倍增效应/介质损耗Key words
Secondary electron emission, Multiplier effect, Dielectric loss分类
信息技术与安全科学引用本文复制引用
郑晓阳,张永清..输出窗的二次电子的作用及其抑制措施[J].真空电子技术,2011,(3):59-61,3.
