半导体学报2011，Vol.32Issue(6)：51-54,4.DOI:10.1088/1674-4926/32/6/064008
Porous waveguide facilitated low divergence quantum cascade laser*
Porous waveguide facilitated low divergence quantum cascade laser*
摘要
Abstract
A quantum cscade laser with a porous waveguide structure emitting at 4.5 μm is reported. A branchlike porous structure filled with metal material was fabricated on both sides of the laser ridge by an electrochemical etching process. In contrast to the common ridge waveguide laser, devices with a porous structure give rather better beam quality. Utilizing this porous structure as a high-order mode absorber, the device exhibited fundamental transverse mode emission with a nearly diffraction limited far-field beam divergence angle of 4.9°.关键词
quantum cascade laser/ ridge waveguide/ porous structure/ electrochemical etchingKey words
quantum cascade laser/ ridge waveguide/ porous structure/ electrochemical etching引用本文复制引用
Yin Wen,Lu Quanyong,Liu Wannfeng,Zhang Jinchuan,Wang Lijun,Liu Junqi,Li Lu,Liu Fengqi,Wang Zhanguo..Porous waveguide facilitated low divergence quantum cascade laser*[J].半导体学报,2011,32(6):51-54,4.基金项目
Project supported by the National Science Fund for Distinguished Young Scholars and other Research Projects of China (Nos.60525406,60736031,60806018,60906026,2006CB604903,2007AA03Z446,2009AA03Z403). （Nos.60525406,60736031,60806018,60906026,2006CB604903,2007AA03Z446,2009AA03Z403）
