物理学报2011，Vol.60Issue(6)：240-244,5.
原子运动速度对激光驻波场作用下纳米光栅沉积特性的影响
Characteristics of deposition for neutral atoms in laser standing wave with different velocities
摘要
Abstract
The deposition patterns of neutral chromium atoms in a laser standing wave with different longitudinal and transverse velocities are discussed. The simulation results of atoms show that the full width at half maximum ( FWHM ) of a nanometer stripe is 1. 49 nm and the contrast is 62. 1: 1 when the ideal longitudinal velocity of chromimum atom is the most probable velocity 960 m/s, the FWHM of the stripe is 5. 35nm and the contrast is 25. 6: 1 when the longitudinal velocity of chromimum atom is half the most probable velocity. The simulation results of deposition with different transverse velocities are shown at the same time, the FWHM of the stripe is 4. 18nm and the contrast is 20. 9: 1, with the transverse velocity of chromimum atom being 0. 25 m/s; the FWHM of the stripe is 58. 4 nm and the contrast is 8. 9: 1, with the transverse velocity of chromimum atom being 0. 50 m/s.关键词
原子光刻/纳米计量/激光驻波场/纳米光栅结构Key words
atom lithography/ nano metrology/ laser standing wave/ nanometer stripe引用本文复制引用
张文涛,朱保华,熊显名,黄静..原子运动速度对激光驻波场作用下纳米光栅沉积特性的影响[J].物理学报,2011,60(6):240-244,5.基金项目
国家自然科学基金(批准号:11064002,11061011)资助的课题. （批准号:11064002,11061011）
