传感技术学报2011，Vol.24Issue(6)：799-802,4.DOI:10.3969/j.issn.1004-1699.2011.06.004
掺入SiO2纳米颗粒对厚膜ZnO气敏传感器气敏性能的影响
Effect of SiO2 Nanoparticles Doped Thick Film ZnO Gas Sensor
摘要
Abstract
SiO2-doped and pure ZnO thick film gas sensors were prepared by using screen printing technique and tested for their methanol and ethanol gas sensitivity. Morphological properties of the thick film are studied by using field emission scanning electron microscopy ( FESEM). The results show that SiO2 -doped is quite effective in restraining the growth of ZnO grains. SiO2-doped enhanced the sensitivity of thick film ZnO gas sensor to methanol and ethanol gases at the operating temperature of 400 ~ 450 ℃. However, the sensitivity of this thick film ZnO gas sensor to methanol and ethanol gases was restrained, at the operating temperature between 200 ℃ and 350 ℃. Furthermore, the response time of the SiO2-doped ZnO film was always longer than that of pure ZnO. Finally,the sensitive mechanism of the thick film gas sensor was analyzed and discussed.关键词
ZnO；掺SiO2的Zn；厚膜；气敏传感器Key words
ZnO/SiO2-doped ZnO/thick film/gas sensor分类
信息技术与安全科学引用本文复制引用
孙迎伟,胡木林,周志刚..掺入SiO2纳米颗粒对厚膜ZnO气敏传感器气敏性能的影响[J].传感技术学报,2011,24(6):799-802,4.基金项目
国家科技部863项目“ZnO基纳米复合敏感材料规模化制备和低能耗、快速响应、高敏感元件阵列的研制”(2006AA03Z338) （2006AA03Z338）
