传感技术学报2011，Vol.24Issue(6)：835-838,4.DOI:10.3969/j.issn.1004-1699.2011.06.011
矢量水听器的芯片级减震结构的设计
The Design of a Vector Hydrophone's Chip-Level Damping Structure
摘要
Abstract
A novel damping spring structure is designed based on the existing structure of MEMS vector hydrophone. It is desirable that this novel structure can improve the antinoise ability of hydrophone. According to finite element simulation by Ansys,the geometry,stiffness and location of the spring are determined. Two pairs of spring are adopted and placed inside and outside vertically. Simulation results show that the reducing flow noise ability of this damping structure can be increased by 3 times, as well as it does not affect the sensitivity of hydrophone. The advantages of this chip-level spring damping structure are one integrated, good consistency and engineering applications.关键词
矢量水听器；减震；ansys/弹簧；劲度系数Key words
vector hydrophone/damping/ansys/spring/coefficient of stiffness分类
通用工业技术引用本文复制引用
刘细宝,张国军,薛晨阳,许姣,王晓瑶,于佳琪,李辉..矢量水听器的芯片级减震结构的设计[J].传感技术学报,2011,24(6):835-838,4.基金项目
国家自然科学基金项目(50775209) （50775209）
