传感技术学报2011，Vol.24Issue(6)：848-852,5.DOI:10.3969/j.issn.1004-1699.2011.06.014
考虑边缘效应的平行平板式静电微执行器Pull-in模型
A Pull-in Model for Parallel-Plate Electrostatically MEMS Actuators with the Fringing Field Effect
摘要
Abstract
Predicting Pull-in parameters is crucial in the design of MEMS actuators. In the past, the Pull-in parameters of parallel plate MEMS devices with the fringing field effect are often estimated by using finite element method (FEM). However,FEM is cumbersome,time consuming and non-transparent,which is not convenient for the design optimization. Usually, there are a simple analytical model and a detailed analytical model for fringing capacitance respectively. This paper uses the two models to derive the Pull-in model of parallel plate MEMS devices with the fringing field effect respectively. The accuracy of the two Pull-in models is examined by comparing their results with the FEM results. Simulation results show that the Pull-in model based on the simple analytical model for fringing capacitance is unsuitable to predict Pull-in parameters. The Pull-in model based on the detailed analytical model has shown a good agreement with the FEM results for a wide range of gap spacing.关键词
MEMS/Pull-in/微执行器/边缘效应Key words
MEMS/pull-in/microactuators/fringing field effect分类
信息技术与安全科学引用本文复制引用
方玉明,李普..考虑边缘效应的平行平板式静电微执行器Pull-in模型[J].传感技术学报,2011,24(6):848-852,5.基金项目
国家自然科学基助项目(60806036，51075072)；江苏省自然科学基金项目(BK2009286)；2010年度江苏省高校“青蓝工程” （60806036，51075072）
