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沉积温度对碳芯SiC纤维微观结构的影响

赵松 史景利 魏兴海 闫曦 刘朗

宇航材料工艺2011,Vol.41Issue(4):36-40,5.
宇航材料工艺2011,Vol.41Issue(4):36-40,5.

沉积温度对碳芯SiC纤维微观结构的影响

Effects of Deposition Temperature on Microstructure of Silicon Carbide Filaments With Carbon Core

赵松 1史景利 2魏兴海 1闫曦 1刘朗1

作者信息

  • 1. 中国科学院山西煤炭化学研究所,炭材料重点实验室,太原030001
  • 2. 中国科学院研究生院,北京100049
  • 折叠

摘要

Abstract

By using pitch-based carbon filaments as the substrate in cold-wall chemical vapor deposition process, silicon carbide filaments were prepared from methyltrichlorosilane and hydrogen system. The effect of deposition temperature (from 1 473 K to 1 773 K) on microstructure of as prepared fibers was investigated by scanning electron microscopy and Raman spectrascopy. The results shows that the main crystalline phase of coating is fJ-SiC. The increase in deposition temperature leads to the increase of deposition rate and the enlargement of grain size of SiC coating. Meanwhile, as the deposited temperature increases, the microstructure rearrangement of the central region of carbon core results in the decrease of grain size and better orientation.

关键词

化学气相沉积/碳芯/SiC纤维/微观结构

Key words

CVD/ Carbon core/ Silicon carbide filament/ Microstructure

引用本文复制引用

赵松,史景利,魏兴海,闫曦,刘朗..沉积温度对碳芯SiC纤维微观结构的影响[J].宇航材料工艺,2011,41(4):36-40,5.

宇航材料工艺

OA北大核心CSCDCSTPCD

1007-2330

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