现代制造工程Issue(8)：1-5,11,6.
聚甲基丙烯酸甲酯薄膜的弹性模量测量研究
Determination for the elastic modulus of the PMMA thin film
摘要
Abstract
Polymer materials have been considered as an ideal storage medium in novel storage technology,a ultrahigh density data storage technology though thermo-mechanical method based on the Scanning Probe Microscopy(SPM) technology,due to their easily thermal deforming、stability in normal temperature and perfect destroying-resistance. And the mechanical properties of the storage medium can significantly affect the morphology of the data-point as formed by the thermal deformation. The nanoindenta-tion method was chosen for determinating the elastic modulus of the poly (methyl methacrylate) (PMMA) film with 270 nm thickness, by applying two load-holding process,it effectively eliminated the affect of the material's viscosity property on the measurement. The substrate effects was also estimated by inputing a parameter relating to the penetrated depth,and the determined elastic modulus at normal temperature is 6.5GPa.关键词
聚甲基丙烯酸甲酯/薄膜/纳米压痕/弹性模量/黏性/基底效应Key words
PMMA/film/nanoindentation/elastic modulus/viscosity/substrate effects分类
通用工业技术引用本文复制引用
许兴中,赵钢,刘勇,荣皓,褚家如..聚甲基丙烯酸甲酯薄膜的弹性模量测量研究[J].现代制造工程,2011,(8):1-5,11,6.基金项目
国家自然科学基金资助项目(50805137) （50805137）
