粉末冶金技术2011，Vol.29Issue(3)：169-172,4.
CuAlO2陶瓷靶材的制备及其性能研究
Preparation and performance of CuAlO2 ceramic target
摘要
Abstract
CuAlO2 ceramic targets were prepared by solid-phase sintering. Structure and performance of CuAlO2 ceramic targets were measured by XRD,RT and SEM. Furthermore, effects of sintering temperature and time on the CuAlO2 ceramic targets were investigated. The experiment results shown that the optimum sintering temperature and time is 1 150℃ and 10 hours respectively. Maximum density of CuAlO2 targets is (4. 83g/cm3) 95% of theoretical density, electrical conductivity at room temperature 1. 3 × 10-2S · Cm-1 , and activation energy 0. 265eV.关键词
透明导电氧化物；CuAlO2；固相烧结；电导率Key words
transparent conductive oxide/ CuAlO2/ solid-phase sintering/ electrical conductivity引用本文复制引用
兰军,刘翔,张辉,段云彪,储清梅,曹明刚,张少春..CuAlO2陶瓷靶材的制备及其性能研究 [J].粉末冶金技术,2011,29(3):169-172,4.基金项目
云南省自然科学基金资助项目(2009ZC013M)；昆明理工大学校重点基金资助项目(KKZ1200927003) （2009ZC013M）
