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双纳米硅p层优化非晶硅太阳能电池

刘石勇 曾湘波 彭文博 姚文杰 谢小兵 杨萍 王超 王占国

材料工程Issue(8):5-7,13,4.
材料工程Issue(8):5-7,13,4.

双纳米硅p层优化非晶硅太阳能电池

Optimization of Double Nanocrystalline Silicon p-layers for Amorphous Silicon Solar Cells

刘石勇 1曾湘波 1彭文博 1姚文杰 1谢小兵 1杨萍 1王超 1王占国1

作者信息

  • 1. 中国科学院半导体研究所材料科学重点实验室,北京100083
  • 折叠

摘要

Abstract

The plasma enhanced chemical vapor deposition (PECVD) system was used for fabricating the silicon films with different hydrogen dilution ratio (RH) under the high power density, high pressure and low substrate temperature. High-resolution transmission electron microscopy (HRTEM) and Raman spectroscopy indicated that the thin films were nanocrystalline silicon (nc-Si) films which contained nanocrystallites with grain size around 3-5nm. The effects of the RH on the optical band gaps of the nc-Si thin films were studied. The results showed that the optical band gaps of the nc-Si thin films increased with the increased in the RH. An double nc-Si p-layers structure was developed to improve the I/p interface in hydrogenated amorphous silicon (a-Si : H) solar cells. The efficiency of the double nc-Si p-layers cell was improved by 17% compared its counterpart of the single nc-Si p-layer cell.

关键词

纳米硅/氢稀释比/光学带隙

Key words

nanocrystalline silicon/hydrogen dilution ratio/optical band gap

分类

能源科技

引用本文复制引用

刘石勇,曾湘波,彭文博,姚文杰,谢小兵,杨萍,王超,王占国..双纳米硅p层优化非晶硅太阳能电池[J].材料工程,2011,(8):5-7,13,4.

基金项目

国家重点基础研究发展计划资助项目(2006CB202604) (2006CB202604)

国家自然科学基金资助项目(60576036) (60576036)

中国科学院知识创新工程重要方向资助项目(1KGCX2-YW-383-1) (1KGCX2-YW-383-1)

材料工程

OA北大核心CSCDCSTPCD

1001-4381

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