无机材料学报2011，Vol.26Issue(7)：779-784,6.DOI:10.3724/SP.J.1077.2011.10828
化学气相沉积法制备的块体Si-C-N陶瓷的热行为
Thermal Behaviors of Chemical Vapor Deposited Bulk Si-C-N Ceramic
摘要
Abstract
The amorphous bulk Si-C-N ceramic was prepared by chemical vapor deposition (CVD). The thermal behaviors of as-prepared Si-C-N ceramic were investigated using TG/DSC, XRD, SEM and TEM. The phase separation firstly occurred in amorphous Si-C-N during the heat treatment, and one of separating phases appeared granular. 尾-SiC was formed in the granular separating phase. The amorphous Si-C-N began to crystallize at about 1200鈩?when the ceramic exposed to the heat treatment. The crystallization temperature was about 1372.6鈩? which was determined by DSC under the condition of continuous heating at a heating rate of 20鈩?min. 尾-SiC was found at 1200鈩? while 尾-Si3N4 and 伪-SiC were formed at about 1500鈩? A laminate-like structure appears in the heat-treated Si-C-N. This kind of structure was proved to be the highly crystallized Si-C-N.关键词
非晶态/Si-C-N陶瓷/热行为/晶化Key words
amorphous/Si-C-N ceramic/thermal behavior/crystallization分类
化学工程引用本文复制引用
卢国锋,乔生儒,张程煜,焦更生..化学气相沉积法制备的块体Si-C-N陶瓷的热行为[J].无机材料学报,2011,26(7):779-784,6.基金项目
National Natural Science Foundation of China(50772089) （50772089）
Graduate Project of Weinan Normal University(10YKZ052) （10YKZ052）
Scientific Culture Plan(11YKP018 and 11YKZ003) （11YKP018 and 11YKZ003）
