传感技术学报2011，Vol.27Issue(8)：1114-1117,4.DOI:10.3969/j.issn.1004-1699.2011.08.006
高灵敏度谐振式微加速度传感器的设计与制作
Design and Fabrication of Micro-Machined Resonant Accelerometer
摘要
Abstract
To improve the sensitivity, a novel structure of micro-machined resonant accelerometer based on a new sensing mechanism is designed. The mathematical model for resonant accelerometers is established and the key factors affecting the sensitivity of accelerometer are obtained. The parameters of the structure are optimized based on the analysis. To improve the Q-factor and the stability, the heavily doped silicon is used to fabricate the resonant beams;moreover,the fabrication process is simplified. Owing to the anisotropic etching properties of silicon in KOH solution, the proof mass, the supporting beams and the resonant beams with different thickness can be achieved simultaneously by wet etching. Experimental results show that the sensitivity of the accelerometer is about 1.989 2 kHz/gn over -1 gu to 1 gn range.关键词
微电子机械系统/谐振式加速度传感器/电磁激励/高灵敏度Key words
micro-electronic mechanical systems (MEMS)/ resonant accelerometer/ electromagnetic excited/high sensitivity分类
信息技术与安全科学引用本文复制引用
涂晟,王军波,商艳龙,陈德勇..高灵敏度谐振式微加速度传感器的设计与制作[J].传感技术学报,2011,27(8):1114-1117,4.基金项目
基于谐振式电磁扭摆的微机械生物传感器研究 （）
