传感技术学报2011，Vol.27Issue(8)：1126-1130,5.DOI:10.3969/j.issn.1004-1699.2011.08.009
大输出微控制力矩陀螺的设计
Design of a Micro Control Moment Gyroscope with a Large Torque Output
摘要
Abstract
A novel micro control moment gyroscope( MCMG)with a large torque output is presented. In contrast with the traditional CMG,MCMG uses the angular vibration instead of angular rotation. The MCMG outputs the torque through a coupling of rotor angular vibration and gimbal angular vibration based on the Coriolis Effect. Through locating the electrodes in the centre of the MCMG and etching a trench in the glass wafer,the electrostatic pull-in effect is largely alleviated and the driving voltage is decreased. An array configuration using four MCMGs as an element stabilizes the overall torque output at the array level and eliminates the unwanted torques. The voltage phase differences between every two MCMGs are 90° in sequence. The torque output of the MCMG array is about 5. 12× 10-6 Nm. At last the process flow for this MCMG and possible applications in attitude control of a microsatellite is discussed.关键词
微机电系统/微控制力矩陀螺/陀螺阵列/姿态控制Key words
MEMS/micro control moment gyroscope/gyroscope array/attitude control分类
军事科技引用本文复制引用
常洪龙,白滨,焦文龙,谢建兵,秦子明,苑伟政..大输出微控制力矩陀螺的设计[J].传感技术学报,2011,27(8):1126-1130,5.基金项目
国家“863”计划项目(2009AA04Z320) （2009AA04Z320）
西安应用材料创新基金项目(XA-AM-200801) （XA-AM-200801）
国家自然科学基金项目(60976087) （60976087）
航空基金项目(20070853012) （20070853012）
