电子器件2011，Vol.34Issue(4)：379-382,4.DOI:10.3969/j.issn.1005-9490.2011.04.007
CMOS电容式湿度传感器特性研究
A Study on the Performance of a CMOS Capacitive Humidity Sensor
摘要
Abstract
A study on the performance of a CMOS capacitive humidity sensor is presented. This humidity sensor was fabricated with the standard CMOS technology and the MEMS post-processing step. To test the response time of the humidity sensor,an experimental set-up was designed. As can be seen from the measurements,the sensor shows a good linearity over the testing range from 25% RH to 95% R.H. The maximum hysteresis of the sensor is 2% RH, at 75%RH. And the sensor has a short response time. No obvious drift can be found after the sensor was tested in a short period.关键词
电容式传感器/湿度传感器/CMOS 工艺/MEMSKey words
capacitive sensor/humidity sensor/CMOS technology/MEMS分类
计算机与自动化引用本文复制引用
刘岩,赵成龙,聂萌,秦明..CMOS电容式湿度传感器特性研究[J].电子器件,2011,34(4):379-382,4.基金项目
国家863高技术研究发展计划项目(2009 AA04Z322) （2009 AA04Z322）
国家自然科学基金项目(60901009) （60901009）
