电子器件2011，Vol.34Issue(4)：383-390,8.DOI:10.3969/j.issn.1005-9490.2011.04.008
基于MEMS技术的微型气相色谱柱的研究进展
Development of MEMS Gas Chromatography Column
摘要
Abstract
The micro gas chromatography column is one kind of analytical chemistry devices based on MEMS technology, it aims at separating components in gaseous mixture. The micro-machined gas chromatography column has several advantages compared to traditional one. In the first place, the size of the column has been significantly reduced, hence it can be adapted into portable instruments more easily; secondly, MEMS devices have lower heat capacity and lead to fast heating rate,as a result, the analyzing process is speeded up and the whole performance is meliorated. The development of microfabricated gas chromatography columns was systematically summarized with special emphasis on the column materials, configuration, structure inside the channels, relative MEMS processes and coating procedure.关键词
气相色谱/气体探测/微机电系统/涂敷Key words
gas chromatography/gas detecting/MEMS/coating分类
化学化工引用本文复制引用
廖明杰,王力,杜晓松,谢光忠,胡佳,蒋亚东..基于MEMS技术的微型气相色谱柱的研究进展[J].电子器件,2011,34(4):383-390,8.基金项目
国家自然科学基金项目(60871050) （60871050）
教育部新世纪人才支持计划项目(NCET-08-0086) （NCET-08-0086）
