光学精密工程2011，Vol.19Issue(8)：1750-1756,7.DOI:10.3788/OPE.20111908.1750
RB-SiC反射镜的材料制备、表面改性及非球面加工
Material preparation, surface modification and aspheric processing of RB-SiC mirrors
摘要
Abstract
To solve the problems of RB-SiC mirrors in engineering applications, the material preparation, surface modification and aspheric processing of RB-SiC mirrors were analyzed. Firstly, according to the special modification characteristics of the RB-SiC mirrors, a new material whose thermal expansion coefficient was matched well with that of the RB-SiC was chosen to be a new support for the thermal design. Then, the modification and fabrication technologies of RB-SiC mirrors were improved based on the actual situation of the aspheric processing for better processing reliability and shorter processing cycle. Finally, the improvement were verified by experiments. The experimental results indicate that the modified RB-SiC mirror is in a good condition. The RMSs of the mirror surfaces before and after modifications have changed only 0. 017λ(λ=623. 8 nm,change rate in 13%) ,and the aspheric processing time has decreased 1 month or 2 months. The adequate margin of the 10 μm modified layer in the subsequent processing is ensured,the processing security is improved and the process-ing cycle of the aspheric is shortened due to the new technology, which can been applied to the preparation and processing of other aspheric SiC mirrors as well.关键词
RB-SiC反射镜/表面改性/非球面加工/加工周期Key words
RB-SiC mirror/ surface modification/ aspheric processing/ processing cycle分类
航空航天引用本文复制引用
闫勇,金光..RB-SiC反射镜的材料制备、表面改性及非球面加工[J].光学精密工程,2011,19(8):1750-1756,7.基金项目
国家863高技术研究发展计划资助项目(No.2007AA12Z113) （No.2007AA12Z113）
