光学精密工程2011，Vol.19Issue(8)：1944-1949,6.DOI:10.3788/OPE.20111908.1944
提高光栅莫尔条纹信号质量的滤波方法
Filtering method of improving quality of grating Moiré fringe
摘要
Abstract
A filtering method, phase-difference filtering, was presented to improve the quality of grating Moire fringe. Each field of the 4 field scanning reticle was devided into multi-lines with different phases to suppress the high harmonic generations and to improve the signal quality of the Moire fringe. Firstly, the Fourier series expression of Moire fringe was introduced and various harmonic generations of the Moire fringe were analyzed. Then, the filtering method to eliminate the second, third and fourth harmonic generations was illustrated with the designed grating patterns. Finally, the validity of the method to inhibit the high harmonic generations was verified through simulations and experiments. Experimental results indicate that the third harmonic generation of the Moire fringe signal can be reduced by 4. 9 % and the accuracy can be improved by 0. 5 μm with the period of 20 μm. The method is effective, low cost, without increasing the system size and easy to be used in industrial productions.关键词
莫尔条纹/相位差滤波/指示光栅/高次谐波Key words
Moire fringe/ phase-difference filterings scanning reticle/ high harmonic generation分类
数理科学引用本文复制引用
吴宏圣,曾琪峰,乔栋,郭帮辉..提高光栅莫尔条纹信号质量的滤波方法[J].光学精密工程,2011,19(8):1944-1949,6.基金项目
吉林省科技厅资助项目(No.20106015) （No.20106015）
