光学精密工程2011，Vol.19Issue(9)：2263-2270,8.DOI:10.3788/OPE.20111909.2263
串联光伏电池非晶硅薄膜的Nd3+∶YAG激光辅助掺杂与同时毛化
Nd3+ ∶ YAG laser assisted doping and simultaneous texturization of amorphous Si film for tandem photovoltaic cell
摘要
Abstract
A textured Sb-doped a-Si film is synthesised using laser-assisted doping combined with texturing for a photovoltaic cell applictaion.The amorphous silicon films coated with Sb to a thickness of 200-300 nm are treated intially with a threshold laser fluence of 460 mJ/cm2 for dopant diffusion.To reactivate the dopant,the samples are retreated with a lower laser fluence of 230 mJ/cm2.The laser diffusion and dopant activation are performed by overlapping the laser spots to 90% of its size,so as to subsequently induce texture on the surface.Generation of polycrystalline textured peaks is confirmed with different characterization methods,such as SEM,Raman Spectroscopy,AFM,resistance and absorbance measurements.Treated samples show a crystalline peak of 521 cm-1 with Raman spectroscopy taken from the front and back of the sample.The n-type characteristics of the samples is confirmed through Hall effect measurements,which confirms also the efficient doping.Surface texture with a roughness parameter of 450 nm and improvement in photocondcutivity and absorbance spectrosocpy values are observed,which confirmes the improved photovolataic properties of the samples.关键词
激光辅助掺杂/掺杂/毛化/Sb/光伏电池/Nd3+∶ YAG纳秒激光Key words
laser assisted doping/texturing/Sb/photovoltaic cell/Nd3+ ∶ YAG ns-laser分类
信息技术与安全科学引用本文复制引用
VASA N J,PALANI I A,SINGAPERUMAL,OKADA..串联光伏电池非晶硅薄膜的Nd3+∶YAG激光辅助掺杂与同时毛化[J].光学精密工程,2011,19(9):2263-2270,8.基金项目
Supported by MEE 0607167 NFSCNILE （）
