计算机工程与应用2011，Vol.47Issue(20)：163-166,4.DOI:10.3778/j.issn.1002-8331.2011.20.046
大口径光学组件面形检测系统关键算法研究
Study on key algorithm in large optical components topography measurementsystem
摘要
Abstract
In the large optical components topography measurement system, the accuracy of measurement is greatly related to laser spot segmentation,centroid extraction and back surface spot removal.As the great difference in multi-spots' light intensity , a twice-segmentation method is proposed to locate the region of the laser spots efficiently.Compared the stability of the algorithms for laser spot's extraction,a gray-gravity method is chosen.A feature based classification method is proposed to discriminate the spots which are reflected by front surface of optical component.Experimental results demonstrate that these algorithms can extract laser spots accurately, stably and classify laser spots efficiently.Also, they are used in optical components topography measurement system successfully.关键词
元件面形/激光光斑/两次分割法/质心提取/前表面光斑识别Key words
optical components topography measurement/ laser spot/ twice-segmentation/ centroid extraction/ discrimination of front reflected laser spot分类
信息技术与安全科学引用本文复制引用
张隽楠,范勇,陈念年,王俊波,袁晓东,程晓峰,徐旭,刘楠..大口径光学组件面形检测系统关键算法研究[J].计算机工程与应用,2011,47(20):163-166,4.基金项目
国家自然科学基金委.中国工程物理研究院联合基金项目 (No.10676029,No.10776028). （No.10676029,No.10776028）
