强激光与粒子束2011，Vol.23Issue(7)：1753-1757,5.DOI:10.3788/HPLPB20112307.1753
多脉冲飞秒激光对锗材料的烧蚀效应
Ablation morphology of germanium with multi-pulse femtosecond laser
摘要
Abstract
Ablation morphology on germanium surface using multi-pulse femtosecond laser is reported. The SEM and laser focus give magnified views of the ablated portion. The ablation morphology shows a periodic surface structure with various laser pulses. And the formation of amorphous rings and ripples in the damage spot is discussed. The ablation threshold is 1. 2 J ? cm-2 and the ablation depth with single femtosecond laser pulse is about 150 nm. It is meanful for research the interaction of femtosec-ond laser and material, and the application of femtosecond laser in micromachining.关键词
飞秒激光/锗/烧蚀阈值/烧蚀形貌/扫描电镜Key words
femtosecond laser/germanium/ablation threshold/ablation morphology/scanning electron microscope/分类
信息技术与安全科学引用本文复制引用
辛建婷,谭放,罗国强,马小军,赵宗清,韩丹..多脉冲飞秒激光对锗材料的烧蚀效应[J].强激光与粒子束,2011,23(7):1753-1757,5.基金项目
国家自然科学基金项目(10902101) （10902101）
