信息与电子工程2011，Vol.9Issue(4)：后插2-后插10,9.
开启微纳传感领域的新天地——Transducers2011国际会议综述
The New Era of Sensors, Actuators and Micro Systems——Overview of Transducers' 11
孙旭明 1朱福运 1唐伟 1张晓升 1袁泉 1张海霞1
作者信息
- 1. 北京大学微米/纳米加工技术国家重点实验室,北京100871
- 折叠
摘要
Abstract
The 16th International Conference on Solid-State Sensors, Actuators and Micro Systems (Transducers'11) was held in Beijing, China during June 5-9, 2011. Including Sensors, Actuators, Fabrication, Bio-MEMS, Power MEMS and several other subjects, 743 papers were accepted. This conference brought together more than 1200 leading scientists and researchers world-wide to disseminate their most recent and advanced findings. In this review, the current research in microfluidics, wafer-level process, chemical sensors and Power MEMS was introduced. The prospect of transducers was analyzed. The success of this conference would greatly promote the development of MEMS in China.关键词
Transducers'11/MEMS/新型传感器/微系统Key words
Transducers'11/ MEMS/ Sensors & Actuators/ Micro System引用本文复制引用
孙旭明,朱福运,唐伟,张晓升,袁泉,张海霞..开启微纳传感领域的新天地——Transducers2011国际会议综述[J].信息与电子工程,2011,9(4):后插2-后插10,9.
