信息与控制2011，Vol.40Issue(4)：477-482,6.DOI:10.3724/SP.J.1219.2011.00477
基于随机Petri网的集束装备模型及马尔可夫链分析
Cluster Tools Model and Markov Chain Analysis Based on Stochastic Petri Nets
摘要
Abstract
In order to analyze the performance of cluster tools, stochastic Petri nets approach is used to model the serial production process of cluster tools. With "top down" methods, the basic models of tool's modules are developed firstly. Then, according to the actual production process, all the basic models are combined to construct a stochastic Petri nets model of the production system. Markov chain analysis process based on the model is provided. Furthermore, the system throughput and the usage rate of every production chambers are deduced. The result shows that the model not only represents the concurrent activity of cluster tools, but also describes the stochastic occurrence times of all activities. This method can effectively describe and analyze the production process of cluster tools.关键词
随机Petri网/模型/集束装备:马尔可夫链/吞吐率Key words
stochastic Petri net/ model/ cluster tool/ Markov chain/ throughput分类
信息技术与安全科学引用本文复制引用
郑秀红,胡静涛,于海斌..基于随机Petri网的集束装备模型及马尔可夫链分析[J].信息与控制,2011,40(4):477-482,6.基金项目
国家科技重大专项课题资助项目(2009ZX02001-005,2009ZX02008-003) （2009ZX02001-005,2009ZX02008-003）
沈阳市科技计划资助项目(108155-2-00). （108155-2-00）
