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首页|期刊导航|半导体学报|Optimization of Al2O3/SiNx stacked antireflection structures for N-type surfacepassivated crystalline silicon solar cells

Optimization of Al2O3/SiNx stacked antireflection structures for N-type surfacepassivated crystalline silicon solar cells

Wu Dawei Jia Rui Ding Wuchang Chen Chen Wu Deqi Chen Wei Li Haofeng Yue Huihui Liu Xinyu

半导体学报2011,Vol.32Issue(9):58-61,4.
半导体学报2011,Vol.32Issue(9):58-61,4.DOI:10.1088/1674-4926/32/9/094008

Optimization of Al2O3/SiNx stacked antireflection structures for N-type surfacepassivated crystalline silicon solar cells

Optimization of Al2O3/SiNx stacked antireflection structures for N-type surfacepassivated crystalline silicon solar cells

Wu Dawei 1Jia Rui 1Ding Wuchang 1Chen Chen 1Wu Deqi 1Chen Wei 1Li Haofeng 1Yue Huihui 1Liu Xinyu1

作者信息

  • 1. Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 折叠

摘要

Abstract

In the case of N-type solar cells,the anti-reflection property,as one of the important factors to further improve the energy-conversion efficiency,has been optimized using a stacked Al2O3/SiNx layer.The effect of SiNx layer thickness on the surface reflection property was systematically studied in terms of both experimental and theoretical measurement.In the stacked Al2O3/SiNx layers,results demonstrated that the surface reflection property can be effectively optimized by adding a SiNx layer,leading to the improvement in the final photovoltaic characteristic of the N-type solar cells.

关键词

antireflection coatings/ aluminum oxide/ silicon nitride/ simulation/ solar cells

Key words

antireflection coatings/ aluminum oxide/ silicon nitride/ simulation/ solar cells

引用本文复制引用

Wu Dawei,Jia Rui,Ding Wuchang,Chen Chen,Wu Deqi,Chen Wei,Li Haofeng,Yue Huihui,Liu Xinyu..Optimization of Al2O3/SiNx stacked antireflection structures for N-type surfacepassivated crystalline silicon solar cells[J].半导体学报,2011,32(9):58-61,4.

基金项目

Project supported by the State Key Development Program for Basic Research of China (Nos.2006CB604904,2009CB939703),the National Natural Science Foundation of China (Nos.60706023,60676001,90401002,90607022),the Chinese Academy of Sciences (No.YZ0635),and the Chinese Academy of Solar Energy Action Plan. (Nos.2006CB604904,2009CB939703)

半导体学报

OACSCDCSTPCDEI

1674-4926

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