表面技术Issue(5)：101-103,3.
蓝宝石晶片机械化学研磨抛光新方法研究
The Study on the Method of Mechano-chemical Polishing about the Grinding Polishing of Sapphire
摘要
Abstract
In order to increase the material removal rate with good surface quality, this article introduces the method that abrasive which is SiO2 removes the soft reaction layer of the solid state-reaction between the sapphire (α-Al2O3)and SiO2. At the same time, mixing the MgF2 powder as catalyst and SiO2 abrasive can have a better effect.关键词
蓝宝石晶片/固相反应/SiO2/催化剂/MgF2Key words
sapphire crystal/solid state-reaction/SiO2/catalyst/MgF2分类
矿业与冶金引用本文复制引用
王吉翠,邓乾发,周兆忠,李振,袁巨龙..蓝宝石晶片机械化学研磨抛光新方法研究[J].表面技术,2011,(5):101-103,3.基金项目
国家自然科学基金重点项目(50535040) （50535040）
2010年浙江省自然基金资助(Y1101085,Y1101095) （Y1101085,Y1101095）
