传感技术学报2011，Vol.24Issue(9)：1265-1269,5.DOI:10.3969/j.issn.1004-1699.2011.09.008
微陀螺梳齿静电驱动力的计算方法
The Calculation Method of the Electrostatic Drive Force of Micro Machined Groscope Comb
姚峰林 1高世桥2
作者信息
- 1. 北京理工大学机电学院,北京100081
- 2. 太原科技大学机电学院,太原030024
- 折叠
摘要
Abstract
To calculate the electrostatic force in the micro machined gyroscope is a key problem in the mechanical characteristic of it. Base on the principle of electrostatic drive of the micro machined gyroscope, the paper introduces infinite plane model, edge-effect model and comer-effect model as the electrostatic field computation module of the micro comb. It deduces the formula of capacitance computation and electrostatic force of three models. By the numerical calculation and finite element calculation, it gets the capacitance and the electrostatic force of the gyroscope and the applicable circumstance of each model that the overlap length in variation. It suggests that the edge-effect and the corner-effect of comb should be fully considered when designing and computing the comb.关键词
微陀螺/边缘效应/拐角效应/数值计算/驱动力Key words
micro machined gyroscope/edge-effect/comer-effect/numerical calculation/drive force分类
信息技术与安全科学引用本文复制引用
姚峰林,高世桥..微陀螺梳齿静电驱动力的计算方法[J].传感技术学报,2011,24(9):1265-1269,5.
