材料工程Issue(10)：58-60,65,4.
调制周期对ReB2/TaN纳米多层膜的结构和力学性能影响
Effect of Modulation Period on Structure and Mechanical Properties of ReB2/TaN Nanoscale Nanomultilayers
摘要
Abstract
A series of nanoscale ReB2/ TaN multilayered coatings were prepared by ultra-high vacuum RF magnetron sputtering system at 20℃. The influence of modulation period (Λ) on the microstruc-ture and mechanical properties of the film was investigated by SEM, XRD, surface profiler and nano-indenter. The results showed that ReB2 and TaN layers exhibited hexagonal structure in films. ReB2/ TaN multilayers have superhard effects with a modulation period from 8-12nm. At Λ = 9. 6nm, ReB2/ TaN multilayered possessed the highest hardness of 28. 8GPa and modulus of 345. 9GPa with lower residual stress.关键词
射频磁控溅射/ReB2/TaN纳米多层膜/调制周期/硬度Key words
RF magnetron sputtering/ReB2/TaN multilayered coating/modulation period/hardness分类
矿业与冶金引用本文复制引用
刘广庆,张帅,刘孟寅,李德军..调制周期对ReB2/TaN纳米多层膜的结构和力学性能影响[J].材料工程,2011,(10):58-60,65,4.基金项目
国家自然科学基金(50872094) （50872094）
天津市应用墓础及前沿技术研究计划重点项目(2012) （2012）
