传感技术学报2011，Vol.24Issue(10)：1416-1421,6.DOI:10.3969/j.issn.1004-1699.2011.10.009
微加速度计启动漂移特性研究与实验
Characteristic Research and Experiment of Micro Accelerometer Startup Drift
摘要
Abstract
The bulk silicon micro accelerometer exists the problem of long start-up time and large start-up drift which can not satisfy the requirement of fast start-up application. In order to reduce the start-up time of the micro accelerometer, this paper researches on the start-up characteristic of the micro accelerometer, analyzes the heat generating and its conduct in the micro structure and the detection circuit and establishes the finite element model for the thermal analysis. A thermal resistor with the micro structure inside the chip package was fabricated to verify the analysis. Finally,with a series of experiment,it was proved that the thermal conduction and time drift are the main reason of the micro accelerometer startup drift.关键词
微加速度计/启动漂移/热分析/热传导Key words
micro accelerometer/startup drift/thermal analysis/thermal conduction分类
机械制造引用本文复制引用
代刚,李枚,杜连明,何晓平,苏伟,邵贝贝..微加速度计启动漂移特性研究与实验[J].传感技术学报,2011,24(10):1416-1421,6.基金项目
“十一五”国防预研项目 （）
