激光技术2011，Vol.35Issue(6)：784-786,836,4.DOI:10.3969/j.issn.1001-3806.2011.06.017
条纹相位分析小区域平整度检测
Flatness detection of small plane by means of fringe phase
摘要
Abstract
In order to detect and evaluate the flatness of small plane of diffuse reflection, a method was presented based on carrier fringe phase analysis. With a laser as illuminating light source, a coherent fringe pattern at period of 1OOμm was achieved. The modulated phase distribution of the testing surface was retrieved after Fourier transform and converted into the physical height distribution, and then these height data were applied to evaluate the surface flatness. The detailed theoretical analysis was presented. The theoretical height resolution can reach 10μm. Due to the effect of the noise, the experimental height resolution only reached 20μm. The experimental results prove that the method is valid.关键词
信息光学/平整度检测/条纹分析/漫反射材料Key words
information optics/ flatness detection/ fringe analysis/ diffuse reflection material分类
数理科学引用本文复制引用
杨初平,纪婧如,谭穗妍,林盈洪..条纹相位分析小区域平整度检测[J].激光技术,2011,35(6):784-786,836,4.基金项目
广东省自然科学基金资助项目(9151064201000035) （9151064201000035）
