半导体学报2011，Vol.32Issue(12)：40-43,4.DOI:10.1088/1674-4926/32/12/122003
Peltier effect in doped silicon microchannel plates
Peltier effect in doped silicon microchannel plates
摘要
Abstract
The Seebeck coefficient is determined from silicon microchannel plates(Si MCPs)prepared by photoassisted electrochemical etching at room temperature(25 ℃).The coefficient of the sample with a pore size of 5 × 5μm2,spacing of 1 μm and thickness of about 150μm is-852 μV/K along the edge of the square pore.After doping with boron and phosphorus,the Seebeck coefficient diminishes to 256 μV/K and-117 μV/K along the edge of the square pore,whereas the electrical resistivity values are 7.5 × 10-3 Ω·cm and 1.9 × 10-3 Ω·cm,respectively.Our data imply that the Seebeck coefficient of the Si MCPs is related to the electrical resistivity and is consistent with that of bulk silicon.Based on the boron and phosphorus doped samples,a simple device is fabricated to connect the two type Si MCPs to evaluate the Peltier effect.When a proper current passes through the device,the Peltier effect is evidently observed.Based on the experimental data and the theoretical calculation,the estimated intrinsic figure of merit ZT of the unicouple device and thermal conductivity of the Si MCPs are 0.007 and 50 W/(m·K),respectively.关键词
silicon microchannel plates/ doping/ thermoelectric/ Peltier effectKey words
silicon microchannel plates/ doping/ thermoelectric/ Peltier effect引用本文复制引用
Ci Pengliang,Shi Jing,Wang Fei,Xu Shaohui,Yang Zhenya,Yang Pingxiong,Wang Lianwei,Gao Chen,Paul K.Chu..Peltier effect in doped silicon microchannel plates[J].半导体学报,2011,32(12):40-43,4.基金项目
Project supported by the Shanghai Fundamental Key Project(No.10JC1404600),the Shanghai Natural Science Foundation(No.11ZR1411000),the Innovation Program of Shanghai Municipal Education Commission(No.09ZZ46),the International Collaboration Project(No.10520704400),the National Natural Science Foundation of China(Nos.60990312,61076060,61176108),and the City University of Hong Kong Strategic Research Grant(SRG)(No.7008009). （No.10JC1404600）
