电测与仪表2011，Vol.48Issue(10)：64-68,5.
基于比率法的微电容测量仪
Ultra Low Capacitance Measurement Instrument Based on Ratio Method
彭建学 1叶银忠 2刘以建 3李建明4
作者信息
- 1. 海奥波电子有限公司,上海200070
- 2. 上海应用技术学院,上海200235
- 3. 上海海事大学物流工学院,上海200135
- 4. 上海精密科学仪器有限公司,上海200433
- 折叠
摘要
Abstract
A new ultra low capacitance measurement method based on the ratio is proposed against the shortcomings of the traditional measurement methods. A sinusoidal wave excitation source with a current-limiting resistor is introduced to ensure the excitation source itself and the pre-amplifier to work properly and to enhance the ability of eliminating the stray capacitances. The capacitance of the capacitor can be obtained by measuring the voltage across the capacitor and the current flowing through the capacitor. The lock-in amplifying technology is applied to eliminate the effects of the noise and the DC offset. The scheme of such ultra low capacitance measurement system is given out. The experimental results show that the resolution of the capacitance measurement reaches 0.0 lpF and prove the effectiveness of the proposed method.关键词
微电容测量/锁相放大/杂散电容/噪声/直流失调Key words
low capacitance measurement, lock-in amplifying, stray capacitances, noise, DC offset.分类
信息技术与安全科学引用本文复制引用
彭建学,叶银忠,刘以建,李建明..基于比率法的微电容测量仪[J].电测与仪表,2011,48(10):64-68,5.
