北京科技大学学报2011，Vol.33Issue(12)：1516-1522,7.
锌还原法制备多晶硅过程影响硅产率的因素分析
Influencing factors of silicon productivity during production of polycrystalline silicon by zinc reduction process
摘要
Abstract
Some factors influencing silicon productivity were studied for producing polycrystalline silicon by zinc reduction.When the reaction reached equilibrium,the relation between gas phase compositions and temperature was analyzed at the Zn/SiCl4 molar ratio of 2,4 and 8 under the pressure of 0.1,0.3 and 0.6MPa,respectively.The changes of silicon productivity with gas pressure,temperature and Zn/SiCl4 molar ratio were discussed.The results show that lower temperatures,suitable pressures and higher Zn/SiCl4 molar ratios have a positive effect on the zinc reduction process.The major side-reactions which affect the silicon productivity were then determined.Finally the optimum operating conditions for the zinc reduction process were presented as 1200K,0.2MPa and the Zn/SiCl4 molar ratio of 4.Under the optimum operating conditions,the theoretical silicon productivity can be 90.3%.关键词
多晶硅/锌/还原/产率/热力学/相平衡Key words
polycrystalline silicon/zinc/reduction/productivity/thermodynamics/phase equilibria分类
信息技术与安全科学引用本文复制引用
侯彦青,谢刚,陶东平,俞小花,李荣兴,姚云..锌还原法制备多晶硅过程影响硅产率的因素分析[J].北京科技大学学报,2011,33(12):1516-1522,7.基金项目
国家自然科学基金资助项目 （）
