传感技术学报2011，Vol.24Issue(12)：1668-1671,4.DOI:10.3969/j,issn.1004-1699.2011.12.002
微传感器表面温度非接触测试及In2O3微传感器气敏特性的研究
The Research of Non-Contact Surface Temperature Test and Sensitive Properties of In2O3 Micro Sensors
摘要
Abstract
A non-contact temperature measurement platform was introduced to measure operating temperature of tiny chips according to the theory about the same radiated power for a certain object at the same temperature. On this platform,the relationship between surface temperature and operating current and temperature contours of a micro planar-ceramic sensor( Hanwei Electronics Co. , Ltd. ) was defined. On this base, the optimum operating temperature of In2O3 nanofibers was determined. The sensitive properties of In2O3 sensor were studied at this optimum operating temperature to verify the validity of the temperature measurement system. This method can further extend to the surface temperature measurement of other micro-structure or MEMS devices.关键词
微气体传感器/非接触测温/热辐射/温度分布/三氧化二铟Key words
micro gas sensor/ uncontact temperature measurement/ Infrared radiation/ temperature distribution/In2O3分类
信息技术与安全科学引用本文复制引用
马晓康,丛慧,穆仁,范会涛,杨卉,祈明锋,张小水,张彤..微传感器表面温度非接触测试及In2O3微传感器气敏特性的研究[J].传感技术学报,2011,24(12):1668-1671,4.基金项目
国家自然科学基金项目(51102109) （51102109）
