传感技术学报2011，Vol.24Issue(12)：1681-1686,6.DOI:10.3969/j,issn.1004-1699.2011.12.005
ZrO2:TiO2复合纳米纤维湿度传感器的直、交流特性研究
Study on the DC and AC Properties of Humidity Sensor Based on ZrO2:TiO2 Composite Nanofibers
摘要
Abstract
A capacitive humidity sensor was fabricated based on ZrO2: TiO2 compostie nanofibers. The humidity sensor exhibits high sensitivity and good linearity at 100 Hz of measurement frequency of which capacitance varied four orders of magnitude from 20 pF to 1.5 × 105 pF in the humidity range of 11 % ~ 98% RH. In present paper, the humidity sensing mechanisms of the sensor were discussed by analyzing dc properties ( current-voltage properties and transient with reversing dc bias polarity) and ac properties (complex impedance ) of the sensor. The type of carriers of the sensor at different RH was found via transient ionic current by reversing dc bias polarity. Equivalent circuits of the sensor for different humidity ranges were created based on the corresponding complex impedance plots, and simulated by using the software Zview. Constant phase element (CPE) and Warburg impedance were introduced and used to analyze the influence of ions, electrons and dipoles in the humidity sensing process of the sensor and in alternating-current field.关键词
湿度传感器/复合纳米纤维/ZrO2:TiO2/直流特性/交流特性Key words
humidity sensor/composite nanofibers/ZrO2 :TiO2/dc properties/ac properties分类
通用工业技术引用本文复制引用
苏梅英,王兢,姚朋军,李晓干,郝育闻..ZrO2:TiO2复合纳米纤维湿度传感器的直、交流特性研究[J].传感技术学报,2011,24(12):1681-1686,6.基金项目
国家自然科学基金项目(61176068,61131004,61001054) （61176068,61131004,61001054）
