传感技术学报2012，Vol.25Issue(1)：29-32,4.DOI:10.3969/j.issn.1004-1699.2012.01.006
硅微阵列陀螺仪的仿真、设计与测试
Simulation, Design and Test of Silicon Micro-Gyroscope Array
摘要
Abstract
In order to improve the accuracy and reliability of the silicon micro-gyroscope, a new Micro-gyroscope Array is proposed. The fully symmetrical and half-decoupled quad-mass structure enables the matched resonant frequencies for the drive and sense modes. The structure and the principle of operation were analyzed. The structural simulation of the gyroscope was developed by utilizing the finite element software ANSYS. The resonant frequencies for the drive mode and sense mode were matched by adjusting the structure parameter. The driving and sensing frequencies of the gyroscope were tested. The test results show that the drive mode has three vibration types and the amplitude of the Reversed phase mode is the largest one which is in agreement with the simulation analysis.关键词
硅微阵列陀螺仪/结构设计/ANSYS仿真/扫频实验Key words
silicon micro-gyroscope array/structural design/ANSYS simulation/scanning frequency experiment分类
信息技术与安全科学引用本文复制引用
张印强,杨波,李婧,王寿荣..硅微阵列陀螺仪的仿真、设计与测试[J].传感技术学报,2012,25(1):29-32,4.基金项目
国家自然科学基金项目(60974116) （60974116）
