传感技术学报2012,Vol.25Issue(1):58-61,4.DOI:10.3969/j.issn.1004-1699.2012.01.012
基于平晶的非线性激光扫描直径测量系统
Non-Linear Laser Scanning System for Diameter Measurement Based on Flat-Crystal
摘要
Abstract
A system used for diameter measurement of shaft parts based on flat-crystal scanning is designed. The parallel scanning beam is generated by laser transmission through rotary flat-crystal. The offset betweeen scanning beam and optical axis is a non-linear function of the incident angle and parameters of the flat-crystal. The time of signal jumping which is corresponding to the edge of the workpiece can be obtained by the photoelectric detection ciucuit and the timing circuit. The diameter is determined by the incident angles calculated according to the scale relation between the time and the rotation angle. Using the knife-edge method, the actual non-linear measuring equation of each sensor is aquired by means of parameter fitting and RBF neural network training and then the multi-sensor syetem is calibrated. Within the mearuement range of 100 mm,the 3σ repeatability error is 0.006 mm and the measurement error is ±0.010 mm.关键词
平晶/直径测量/刀口法/RBF神经网络Key words
flat-crystal/ diameter measurement/ knife-edge method/ RBF neural network分类
信息技术与安全科学引用本文复制引用
王一,任永杰,杨凌辉,叶声华..基于平晶的非线性激光扫描直径测量系统[J].传感技术学报,2012,25(1):58-61,4.基金项目
高档数控机床与基础制造装备科技重大专项(2009ZX04014-092) (2009ZX04014-092)