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基于平晶的非线性激光扫描直径测量系统

王一 任永杰 杨凌辉 叶声华

传感技术学报2012,Vol.25Issue(1):58-61,4.
传感技术学报2012,Vol.25Issue(1):58-61,4.DOI:10.3969/j.issn.1004-1699.2012.01.012

基于平晶的非线性激光扫描直径测量系统

Non-Linear Laser Scanning System for Diameter Measurement Based on Flat-Crystal

王一 1任永杰 1杨凌辉 2叶声华1

作者信息

  • 1. 天津大学精密测试技术及仪器国家重点实验室,天津 300072
  • 2. 北京航空航天大学仪器科学与光电工程学院精密光机电一体化技术教育部重点实验室,北京 100191
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摘要

Abstract

A system used for diameter measurement of shaft parts based on flat-crystal scanning is designed. The parallel scanning beam is generated by laser transmission through rotary flat-crystal. The offset betweeen scanning beam and optical axis is a non-linear function of the incident angle and parameters of the flat-crystal. The time of signal jumping which is corresponding to the edge of the workpiece can be obtained by the photoelectric detection ciucuit and the timing circuit. The diameter is determined by the incident angles calculated according to the scale relation between the time and the rotation angle. Using the knife-edge method, the actual non-linear measuring equation of each sensor is aquired by means of parameter fitting and RBF neural network training and then the multi-sensor syetem is calibrated. Within the mearuement range of 100 mm,the 3σ repeatability error is 0.006 mm and the measurement error is ±0.010 mm.

关键词

平晶/直径测量/刀口法/RBF神经网络

Key words

flat-crystal/ diameter measurement/ knife-edge method/ RBF neural network

分类

信息技术与安全科学

引用本文复制引用

王一,任永杰,杨凌辉,叶声华..基于平晶的非线性激光扫描直径测量系统[J].传感技术学报,2012,25(1):58-61,4.

基金项目

高档数控机床与基础制造装备科技重大专项(2009ZX04014-092) (2009ZX04014-092)

传感技术学报

OA北大核心CSCDCSTPCD

1004-1699

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