材料科学与工程学报2011，Vol.29Issue(5)：757-760,765,5.
透明导电AZO/Cu双层薄膜制备及其性能
Fabrication and Properties of Transparent Conductive AZO/Cu Bilayer Films
摘要
Abstract
AZO/Cu bilayer films were prepared on glass substrates by DC magnetron sputtering at room temperature.The influence of AZO layer thickness on the electrical and optical properties of AZO/Cu bilayer films with the Cu layer thickness of 9 nm was studied.At the optimized AZO layer thickness of 20~80nm,the AZO/Cu bilayer films have superior photoelectric properties,such as sheet resistance of 12~14Ω/sq,average visible transmittance of 70~75%,and figure of merit of 2×10-3~5×10-3Ω-1.The Cu（111） and ZnO（002） diffraction peaks could be detected in the X-ray diffraction（XRD） patterns.The optical and electrical properties of AZO/Cu bilayer films have good stability even at 400℃.The combination of room-temperature growth process,superior transparent-conductive properties,acceptable crystalline quality,and high thermal stability enable the AZO/Cu bi-layer films to be widely used in various fields such as transparent electrodes of optoelectronic devices and coated glasses.关键词
AZO/双层薄膜/光电性能/室温生长Key words
AZO/bilayer films/photoelectric properties/room-temperature growth分类
数理科学引用本文复制引用
叶春丽,王钰萍,吕建国..透明导电AZO/Cu双层薄膜制备及其性能[J].材料科学与工程学报,2011,29(5):757-760,765,5.基金项目
高等学校博士学科点专项科研基金资助项目 （）
教育部留学回国人员科研启动基金资助项目 （）
