电子科技2012，Vol.25Issue(1)：108-111,4.
MOCVD片式红外辐射系统调节曲线的仿真与分析
Simulation and Analysis of Temperature Modulate Curve in MOCVD with the Chipped Infrared Heating System
胡莹璐 1李培咸 1李志明 1吴丽敏 1刘红才 1李丁玮 1白俊春1
作者信息
- 1. 西安电子科技大学技术物理学院,陕西西安710071
- 折叠
摘要
Abstract
The change of the peak point of the heating modulate curve, which is based on the modulation of the temperature, in the 2D numerical modeling for the MOCVD reactor is studied by the finite element method with the chipped infrared heating system as a research subject. According to calculation, the change of the modulate curve peak point has a close relationship to the material thermal properties of the Susceptor, the heating power, the geo- metric shapes and position of the heater in the chipped infrared heating system. The internal causes of peak shift are explained. In addition, three principles of designing the heating system are established： The larger the number of heaters is, the more flexible the system modulation is; the biggest power of the outer heater should be greater than the inner heater; the size of outermost heater should be small. The results are beneficial to the design of the MOCVD heating system and the optimization of the heating conditions.关键词
MOCVD/有限元分析/温度场/调节曲线Key words
MOCVD/finite element analysis/temperature field/modulate curve分类
信息技术与安全科学引用本文复制引用
胡莹璐,李培咸,李志明,吴丽敏,刘红才,李丁玮,白俊春..MOCVD片式红外辐射系统调节曲线的仿真与分析[J].电子科技,2012,25(1):108-111,4.
