硅酸盐学报2011，Vol.39Issue(9)：1489-1492,4.
应用于非制冷焦平面器件上的PMN-PT铁电薄膜
PMN-PT Thin Film for Uncooled Infrared Focal Plane Array Applications
摘要
Abstract
lead magnesio–niobate titanate（PMN–PT） ferroelectric thin films were prepared by radio-frequency magnetron sputtering.An annealing procedure for PMN–PT thin films with pre-annealing process was studied.After the annealing procedure was applied,performances of the thin films were investigated.Experimental results show that pre-annealing at 300 ℃ for 5 min followed by an-nealing at 450 ℃ for 5 min are enough for the perovskite formation of PMN–PT films.The test of samples performance with py-roelectric coefficients of 0.9 × 10–8 C/（cm2？K） for PMN–PT thin films indicates that the low annealing procedure might play an im-portant role in the development of monolithic ferroelectric uncooled focal plane arrays.关键词
铌镁酸铅-钛酸铅/热处理/X射线衍射/热释电系数Key words
lead magnesio niobate-lead titanate/annealing/X-ray diffraction/pyroelectric coefficient分类
电子信息工程引用本文复制引用
李振豪,李琳,普朝光..应用于非制冷焦平面器件上的PMN-PT铁电薄膜[J].硅酸盐学报,2011,39(9):1489-1492,4.基金项目
云南省科技计划(2009BC001) （2009BC001）
昆明市科技计划(昆科计字09G040101号)资助项目 （昆科计字09G040101号）
