光学精密工程2011，Vol.19Issue(11)：2551-2557,7.DOI:10.3788/OPE.20111911.2551
圆锥量规锥度的高精度光学干涉法测量
High precision measurement of taper for taper gauge by optical interference method
摘要
Abstract
For ultra-precision Numerical Control (NC) machine tools in advanced manufacturing industry, a high precision measuring method for the taper of a taper gauge was proposed by combining the integral and fractional parts together. The primary principle and the composition of the system were described, and the experimental measurement of a taper gauge was implemented. Moreover, the measurement uncertainty of the system was analyzed. In this method, the high precision indexing system containing a multi-tooth indexing table with an accuracy of 0. 10" was used to ensure the precision and reliability of the integral part, and the laser polarization interference device and a precision rotary table was combined into an angle measuring system to accurately measure the fractional part. Then, the dual-beam white light interference system was used for an accurate positioning. The experiment and analysis results indicate that the measurement uncertainty can be less than 0. 3" when the uncertainty confidence level (k) is 2. The method can realize the high precision taper measurement for any taper gauges.关键词
光学干涉法/圆锥量规/锥度测量Key words
optical interference method/ taper gauges taper measurement分类
通用工业技术引用本文复制引用
康岩辉,张恒..圆锥量规锥度的高精度光学干涉法测量[J].光学精密工程,2011,19(11):2551-2557,7.基金项目
国家重大科技专项资助项目(No.2011ZX04014-061) （No.2011ZX04014-061）
中国计量科学研究院技术改造项目(No.24-AJG1102) （No.24-AJG1102）
中国计量科学研究院长度所基本业务费资助项目(No.24-YS1001) （No.24-YS1001）
