光学精密工程2011，Vol.19Issue(11)：2651-2656,6.DOI:10.3788/OPE.20111911.2651
高速大扫描范围原子力显微镜系统的设计
Design of AFM system with high speed and large scanning range
摘要
Abstract
As current high-speed scanning Atomic Force Microscope (AFM) is mainly designed for the biological imaging application and its scanning speed and scanning range should be improved, a novel high speed AFM was designed. Based on the flexure guide structure driven by piezo actuators, the AFM scanner with a large range was proposed, by which the AFM scanning range is expanded to 100 μm× 100 μm in the x-y directions. By the Fourier expansion, the high harmonic characteristics of the common triangle and sinusoidal driving signals were analyzed, and their effects on the high speed scanning image were discussed. To avoid the mechanical self-oscillation of the stage during scanning, the sinusoidal driving signal was taken to drive the high speed scanning and the line-scan speed was up to 50 line/s. Finally, a new method to eliminate AFM nonlinearity error based on positioning sampling was designed. This method effectively reduces the image distortion resulted from nonlinear errors of the AFM scanner.关键词
原子力显微镜/高速扫描/正弦波驱动/大范围扫描/图像畸变Key words
Atomic Force Microsope(AFM) / high speed scanning/ sinusoidal driving/ large range sca-ning/ image distortion分类
机械制造引用本文复制引用
殷伯华,陈代谢,林云生,初明璋,韩立..高速大扫描范围原子力显微镜系统的设计[J].光学精密工程,2011,19(11):2651-2656,6.基金项目
中国科学院仪器改造项目(No.YZ200831) （No.YZ200831）
