光学精密工程2012，Vol.20Issue(1)：88-95,8.DOI:10.3788/OPE.20122001.0088
压电陶瓷执行器的动态模型辨识与控制
Identification and control of dynamic modeling for piezoceramic actuator
摘要
Abstract
The dynamic model and inverse model of a piezoceramic actuator were proposed to improve its control precision in a precision position system. According to the Weierstrass approximation theorem, the polynomials /( · ) and g( · ) in the Duhem function was developed, and the dynamic model-ing of nonlinear parameters of the piezoceramic actuator was given by using recursive least squares toidentify the model parameters and polynomial coefficients in the Duhem model. Then, an inverse dynamic modeling of the piezoceramic actuator was established based on identified results to simplify the unknown parameter computation process greatly. Finally, the dynamic inverse compensation was incorporated in a closed-loop PID controller to control the piezoceramic actuator. Experimental results indicate that the maximum absolute error with the inverse compensation is less than 0. 8 μm and that with the inverse compensation and PID is less than 40 nm in an amplitude range of 200 μm. The experimental result shows that the proposed identification scheme has improved the nonlinear characteristic of the piezoceramic actuator effectively.关键词
压电陶瓷执行器/Duhem模型/Weierstrass多项式逼近/递推最小二乘法/动态迟滞模型/动态逆迟滞模型/逆补偿Key words
piezoceramic actuator/ Duhem model/ Weierstrass polynomial approximation/ recursive least square /dynamic hysteresis model/dynamic inverse model /inverse compensation分类
信息技术与安全科学引用本文复制引用
陈辉,谭永红,周杏鹏,张亚红,董瑞丽..压电陶瓷执行器的动态模型辨识与控制[J].光学精密工程,2012,20(1):88-95,8.基金项目
国家自然科学基金资助项目(No.60971004) （No.60971004）
上海市科委重点基金资助项目 （）
(No.09220503000,10JC1412200) （No.09220503000,10JC1412200）
上海市自然科学基金资助项目(No.09ZR1423400) （No.09ZR1423400）
上海市教育委员会科研创新基金资助项目(No.09ZZ141,11YZ92) （No.09ZZ141,11YZ92）
上海师范大学重点学科基金资助项目(No.DZL811,DRL904) （No.DZL811,DRL904）
